Beyond-CMOS Nanodevices 1 /
Beyond-CMOS Nanodevices 1 /
edited by Francis Balestra.
- 1 online resource (xix, 495 pages).
- Nanoscience and nanotechnology series .
- Nanoscience and nanotechnology series. .
6.2.3. MEMS piezoelectric vibration energy harvesting transducers.
Includes bibliographical references at the end of each chapters and index.
Cover; Title Page; Copyright; Contents; Acknowledgments; General Introduction; Part 1. Silion Nanowire Biochemical Sensors; Part 1. Introduction; Chapter 1. Fabrication Of Nanowires; 1.1. Introduction; 1.2. Silicon nanowire fabrication with electron beam lithography; 1.2.1. Key requirements; 1.2.2. Why electron beam lithography?; 1.2.3. Lithographic requirements; 1.2.4. Tools, resist materials and development processes; 1.2.5. Exposure strategies and proximity effect correction; 1.2.6. Technology limitations and how to circumvent them. 1.3. Silicon nanowire fabrication with sidewall transfer lithography1.4. Si nanonet fabrication; 1.4.1. Si NWs fabrication; 1.4.2. Si nanonet assembling; 1.4.3. Si nanonet morphology and properties; 1.5. Acknowledgments; 1.6. Bibliography; Chapter 2. Functionalization Of Si-Based NW FETs For DNA Detection; 2.1. Introduction; 2.2. Functionalization process; 2.3. Functionalization of Si nanonets for DNA biosensing; 2.3.1. Detection of DNA hybridization on the Si nanonet by fluorescence microscopy; 2.3.2. Preliminary electrical characterizations of NW networks. 2.4. Functionalization of SiC nanowire-based sensor for electrical DNA biosensing2.4.1. SiC nanowire-based sensor functionalization process; 2.4.2. DNA electrical detection from SiC nanowire-based sensor; 2.5. Acknowledgments; 2.6. Bibliography; Chapter 3. Sensitivity Of Silicon Nanowire Biochemical Sensors; 3.1. Introduction; 3.1.1. Definitions; 3.1.2. Main parameters affecting the sensitivity; 3.2. Sensitivity and noise; 3.3. Modeling the sensitivity of Si NW biosensors; 3.3.1. Modeling the electrolyte; 3.4. Sensitivity of random arrays of 1D nanostructures. 3.4.1. Electrical characterization3.4.2. Low-frequency noise characterization; 3.4.3. Simulation of electron conduction in random networks of 1D nanostructures; 3.4.4. Discussion; 3.5. Conclusions; 3.6. Acknowledgments; 3.7. Bibliography; Chapter 4. Integration Of Silicon Nanowires With CMOS; 4.1. Introduction; 4.2. Overview of CMOS process technology; 4.3. Integration of silicon nanowire after BEOL; 4.4. Integration of silicon nanowires in FEOL; 4.5. Sensor architecture design; 4.6. Conclusions; 4.7. Bibliography. Chapter 5. Portable, Integrated Lock-In-Amplifier-Based System For Real-Time Impedimetric Measurements On Nanowires Biosensors5.1. Introduction; 5.2. Portable stand-alone system; 5.3. Integrated impedimetric interface; 5.4. Impedimetric measurements on nanowire sensors; 5.5. Bibliography; Part 2. New Materials, Devices And Technologies For Energy Harvesting; Part 2. Introduction; Chapter 6. Vibrational Energy Harvesting; 6.1. Introduction; 6.2. Piezoelectric energy transducer; 6.2.1. Introduction; 6.2.2. State-of-the-art devices and materials.
This book offers a comprehensive review of the state-of-the-art in innovative Beyond-CMOS nanodevices for developing novel functionalities, logic and memories dedicated to researchers, engineers and students. It particularly focuses on the interest of nanostructures and nanodevices (nanowires, small slope switches, 2D layers, nanostructured materials, etc.) for advanced More than Moore (RF-nanosensors-energy harvesters, on-chip electronic cooling, etc.) and Beyond-CMOS logic and memories applications.
9781118984796 111898479X 9781118984857 1118984854 9781118984772 1118984773 1848216548 9781848216549
Nanoelectronics.
Nanostructures.
Metal oxide semiconductors, Complementary.
TECHNOLOGY & ENGINEERING--Mechanical.
Metal oxide semiconductors, Complementary.
Nanoelectronics.
Nanostructures.
Electronic books.
TK7871.99.M44
621.381
6.2.3. MEMS piezoelectric vibration energy harvesting transducers.
Includes bibliographical references at the end of each chapters and index.
Cover; Title Page; Copyright; Contents; Acknowledgments; General Introduction; Part 1. Silion Nanowire Biochemical Sensors; Part 1. Introduction; Chapter 1. Fabrication Of Nanowires; 1.1. Introduction; 1.2. Silicon nanowire fabrication with electron beam lithography; 1.2.1. Key requirements; 1.2.2. Why electron beam lithography?; 1.2.3. Lithographic requirements; 1.2.4. Tools, resist materials and development processes; 1.2.5. Exposure strategies and proximity effect correction; 1.2.6. Technology limitations and how to circumvent them. 1.3. Silicon nanowire fabrication with sidewall transfer lithography1.4. Si nanonet fabrication; 1.4.1. Si NWs fabrication; 1.4.2. Si nanonet assembling; 1.4.3. Si nanonet morphology and properties; 1.5. Acknowledgments; 1.6. Bibliography; Chapter 2. Functionalization Of Si-Based NW FETs For DNA Detection; 2.1. Introduction; 2.2. Functionalization process; 2.3. Functionalization of Si nanonets for DNA biosensing; 2.3.1. Detection of DNA hybridization on the Si nanonet by fluorescence microscopy; 2.3.2. Preliminary electrical characterizations of NW networks. 2.4. Functionalization of SiC nanowire-based sensor for electrical DNA biosensing2.4.1. SiC nanowire-based sensor functionalization process; 2.4.2. DNA electrical detection from SiC nanowire-based sensor; 2.5. Acknowledgments; 2.6. Bibliography; Chapter 3. Sensitivity Of Silicon Nanowire Biochemical Sensors; 3.1. Introduction; 3.1.1. Definitions; 3.1.2. Main parameters affecting the sensitivity; 3.2. Sensitivity and noise; 3.3. Modeling the sensitivity of Si NW biosensors; 3.3.1. Modeling the electrolyte; 3.4. Sensitivity of random arrays of 1D nanostructures. 3.4.1. Electrical characterization3.4.2. Low-frequency noise characterization; 3.4.3. Simulation of electron conduction in random networks of 1D nanostructures; 3.4.4. Discussion; 3.5. Conclusions; 3.6. Acknowledgments; 3.7. Bibliography; Chapter 4. Integration Of Silicon Nanowires With CMOS; 4.1. Introduction; 4.2. Overview of CMOS process technology; 4.3. Integration of silicon nanowire after BEOL; 4.4. Integration of silicon nanowires in FEOL; 4.5. Sensor architecture design; 4.6. Conclusions; 4.7. Bibliography. Chapter 5. Portable, Integrated Lock-In-Amplifier-Based System For Real-Time Impedimetric Measurements On Nanowires Biosensors5.1. Introduction; 5.2. Portable stand-alone system; 5.3. Integrated impedimetric interface; 5.4. Impedimetric measurements on nanowire sensors; 5.5. Bibliography; Part 2. New Materials, Devices And Technologies For Energy Harvesting; Part 2. Introduction; Chapter 6. Vibrational Energy Harvesting; 6.1. Introduction; 6.2. Piezoelectric energy transducer; 6.2.1. Introduction; 6.2.2. State-of-the-art devices and materials.
This book offers a comprehensive review of the state-of-the-art in innovative Beyond-CMOS nanodevices for developing novel functionalities, logic and memories dedicated to researchers, engineers and students. It particularly focuses on the interest of nanostructures and nanodevices (nanowires, small slope switches, 2D layers, nanostructured materials, etc.) for advanced More than Moore (RF-nanosensors-energy harvesters, on-chip electronic cooling, etc.) and Beyond-CMOS logic and memories applications.
9781118984796 111898479X 9781118984857 1118984854 9781118984772 1118984773 1848216548 9781848216549
Nanoelectronics.
Nanostructures.
Metal oxide semiconductors, Complementary.
TECHNOLOGY & ENGINEERING--Mechanical.
Metal oxide semiconductors, Complementary.
Nanoelectronics.
Nanostructures.
Electronic books.
TK7871.99.M44
621.381