Advanced interconnects for ULSI technology / (Record no. 19121)

MARC details
000 -LEADER
fixed length control field 04689cam a2200745Ka 4500
001 - CONTROL NUMBER
control field ocn778448543
003 - CONTROL NUMBER IDENTIFIER
control field OCoLC
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20230823095621.0
006 - FIXED-LENGTH DATA ELEMENTS--ADDITIONAL MATERIAL CHARACTERISTICS--GENERAL INFORMATION
fixed length control field m o d
007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION
fixed length control field cr cnu---unuuu
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 120228s2012 nju ob 001 0 eng d
040 ## - CATALOGING SOURCE
Original cataloging agency N$T
Language of cataloging eng
Description conventions pn
Transcribing agency N$T
Modifying agency EBLCP
-- DG1
-- YDXCP
-- CDX
-- COO
-- OCLCQ
-- IDEBK
-- OCLCQ
-- AU@
-- OCLCO
-- OCLCF
-- OCLCQ
-- RECBK
-- DEBSZ
-- OCLCQ
-- S3O
-- OCLCQ
-- DG1
019 ## -
-- 779617142
-- 817082211
-- 819896613
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
ISBN 9781119963240
Qualifying information (electronic bk.)
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
ISBN 1119963249
Qualifying information (electronic bk.)
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
ISBN 9781119963677
Qualifying information (electronic bk.)
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
ISBN 1119963672
Qualifying information (electronic bk.)
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
ISBN 1280590807
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
ISBN 9781280590801
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
Cancelled/invalid ISBN 9780470662540
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
Cancelled/invalid ISBN 0470662549
024 8# - OTHER STANDARD IDENTIFIER
Standard number or code 9786613620637
029 1# - (OCLC)
OCLC library identifier AU@
System control number 000050204433
029 1# - (OCLC)
OCLC library identifier DEBBG
System control number BV041829362
029 1# - (OCLC)
OCLC library identifier DEBSZ
System control number 431101108
029 1# - (OCLC)
OCLC library identifier DKDLA
System control number 820120-katalog:000600718
029 1# - (OCLC)
OCLC library identifier GBVCP
System control number 790036215
029 1# - (OCLC)
OCLC library identifier NZ1
System control number 15900549
035 ## - SYSTEM CONTROL NUMBER
System control number (OCoLC)778448543
Canceled/invalid control number (OCoLC)779617142
-- (OCoLC)817082211
-- (OCoLC)819896613
037 ## - SOURCE OF ACQUISITION
Stock number 10.1002/9781119963677
Source of stock number/acquisition Wiley InterScience
Note http://www3.interscience.wiley.com
050 #4 - LIBRARY OF CONGRESS CALL NUMBER
Classification number TK7874.53
Item number .A39 2012eb
072 #7 - SUBJECT CATEGORY CODE
Subject category code COM
Subject category code subdivision 036000
Source bisacsh
072 #7 - SUBJECT CATEGORY CODE
Subject category code TEC
Subject category code subdivision 008030
Source bisacsh
072 #7 - SUBJECT CATEGORY CODE
Subject category code TEC
Subject category code subdivision 008050
Source bisacsh
082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.39/5
Edition number 23
049 ## - LOCAL HOLDINGS (OCLC)
Holding library MAIN
245 00 - TITLE STATEMENT
Title Advanced interconnects for ULSI technology /
Statement of responsibility, etc [edited by] Mikhail Baklanov, Paul S. Ho, Ehrenfried Zschech.
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT)
Place of publication, distribution, etc Hoboken, NJ :
Name of publisher, distributor, etc Wiley,
Date of publication, distribution, etc 2012.
300 ## - PHYSICAL DESCRIPTION
Extent 1 online resource
336 ## -
-- text
-- txt
-- rdacontent
337 ## -
-- computer
-- c
-- rdamedia
338 ## -
-- online resource
-- cr
-- rdacarrier
520 ## - SUMMARY, ETC.
Summary, etc "This book presents an in-depth overview of present status, novel developments and new materials and approaches for advanced interconnect technology"--
-- Provided by publisher.
504 ## - BIBLIOGRAPHY, ETC. NOTE
Bibliography, etc Includes bibliographical references and index.
588 0# -
-- Print version record.
505 0# - FORMATTED CONTENTS NOTE
Formatted contents note Front Matter -- Colour Plates -- Section I: Low-. Low- Materials: Recent Advances / Geraud Dubois, Willi Volksen -- Ultra-Low- by CVD: Deposition and Curing / Vincent Jousseaume, Aziz Zenasni, Olivier Gourhant, Laurent Favennec, Mikhail R Baklanov -- Plasma Processing of Low- Dielectrics / Hualiang Shi, Denis Shamiryan, Jean-Fraṅois de Marneffe, Huai Huang, Paul S Ho, Mikhail R Baklanov -- Wet Clean Applications in Porous Low- Patterning Processes / Quoc Toan Le, Guy Vereecke, Herbert Struyf, Els Kesters, Mikhail R Baklanov -- Section II: Conductive Layers and Barriers. Copper Electroplating for On-Chip Metallization / Valery M Dubin -- Diffusion Barriers / Michael Hecker, Rene Hubner -- Section III: Integration and Reliability. Process Integration of Interconnects / Sridhar Balakrishnan, Ruth Brain, Larry Zhao -- Chemical Mechanical Planarization for Cu₆Low- Integration / Gautam Banerjee -- Scaling and Microstructure Effects on Electromigration Reliability for Cu Interconnects / Chao-Kun Hu, Rene Hubner, Lijuan Zhang, Meike Hauschildt, Paul S Ho -- Mechanical Reliability of Low- Dielectrics / Kris Vanstreels, Han Li, Joost J Vlassak -- Electrical Breakdown in Advanced Interconnect Dielectrics / Ennis T Ogawa, Oliver Aubel -- Section IV: New Approaches. 3D Interconnect Technology / John U Knickerbocker, Lay Wai Kong, Sven Niese, Alain Diebold, Ehrenfried Zschech -- Carbon Nanotubes for Interconnects / Mizuhisa Nihei, Motonobu Sato, Akio Kawabata, Shintaro Sato, Yuji Awano -- Optical Interconnects / Wim Bogaerts -- Wireless Interchip Interconnects / Takamaro Kikkawa -- Index.
526 ## - STUDY PROGRAM INFORMATION NOTE
Department Electrical & Electronic Engineering
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Interconnects (Integrated circuit technology)
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Integrated circuits
General subdivision Ultra large scale integration.
650 #4 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Integrated circuits
General subdivision Ultra large scale integration.
650 #4 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Interconnects (Integrated circuit technology)
650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element TECHNOLOGY & ENGINEERING
General subdivision Electronics
-- Circuits
-- VLSI & ULSI.
Source of heading or term bisacsh
650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element COMPUTERS
General subdivision Logic Design.
Source of heading or term bisacsh
650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element TECHNOLOGY & ENGINEERING
General subdivision Electronics
-- Circuits
-- Logic.
Source of heading or term bisacsh
650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Integrated circuits
General subdivision Ultra large scale integration.
Source of heading or term fast
-- (OCoLC)fst00975596
650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Interconnects (Integrated circuit technology)
Source of heading or term fast
-- (OCoLC)fst00976051
655 #4 - INDEX TERM--GENRE/FORM
Genre/form data or focus term Electronic books.
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Baklanov, Mikhail.
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Ho, P. S.
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Zschech, Ehrenfried.
773 0# - HOST ITEM ENTRY
Title EBL
776 08 - ADDITIONAL PHYSICAL FORM ENTRY
Display text Print version:
Title Advanced interconnects for ULSI technology.
Place, publisher, and date of publication Hoboken, NJ : Wiley, 2012
International Standard Book Number 9780470662540
Record control number (DLC) 2011038787
-- (OCoLC)757478544
856 40 - ELECTRONIC LOCATION AND ACCESS
Uniform Resource Identifier <a href="http://dx.doi.org/10.1002/9781119963677">http://dx.doi.org/10.1002/9781119963677</a>
Public note Wiley Online Library
994 ## -
-- 92
-- DG1

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