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Handbook of 3D Integration : 3D process technology / edited by Philip Garrou, Mitsumasa Koyanagi, and Peter Ramm.

TextPublisher: Weinheim, Germany : Wiley-VCH, 2014Description: 1 online resourceContent type: text Media type: computer Carrier type: online resourceISBN: 9783527670109; 3527670106Subject(s): Three-dimensional integrated circuits -- Design and construction -- Handbooks, manuals, etc | Three-dimensional imaging -- Handbooks, manuals, etcGenre/Form: Electronic books.DDC classification: 621.3815 LOC classification: TK7874.893Online resources: Wiley Online Library

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Includes bibliographical references and index.

Online resource; title from PDF title page (John Wiley, viewed Aug. 13, 2014).