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Resonant MEMS : fundamentals, implementation and application / edited by Oliver Brand, Isabelle Dufour, Stephen M. Heinrich and Fabien Josse.

Contributor(s): Brand, Oliver, 1964- [editor.] | Dufour, Isabelle (Electrical engineer) [editor.] | Heinrich, Stephen M [editor.] | Josse, Fabien [editor.]Material type: TextTextSeries: Advanced micro & nanosystemsPublication details: Wiesbaden : Wiley-VCH Verlag & Co. KGaA, [2015] Description: 1 online resource : illustrationsContent type: text Media type: computer Carrier type: online resourceISBN: 9783527676361; 3527676368; 9783527676354; 352767635X; 9783527676347; 3527676341; 9783527676330; 3527676333; 3527335455; 9783527335459Subject(s): Microelectromechanical systems -- Design and construction | Microfabrication | Resonance | TECHNOLOGY & ENGINEERING / Electronics / Digital | TECHNOLOGY & ENGINEERING / Electronics / General | TECHNOLOGY & ENGINEERING / Electronics / Microelectronics | Microelectromechanical systems -- Design and construction | Microfabrication | ResonanceGenre/Form: Electronic books. | Electronic books.Additional physical formats: Print version:: Resonant MEMS : fundamentals, implementation and application.DDC classification: 621.381 LOC classification: TK7875Online resources: Wiley Online Library
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Online resource; title from PDF title page (Ebsco, viewed May 11, 2015).

Includes bibliographical references and index.

Electrical & Electronic Engineering

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