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Resonant MEMS : fundamentals, implementation and application / edited by Oliver Brand, Isabelle Dufour, Stephen M. Heinrich and Fabien Josse.

Contributor(s): Material type: TextTextSeries: Advanced micro & nanosystemsPublication details: Wiesbaden : Wiley-VCH Verlag & Co. KGaA, [2015]Description: 1 online resource : illustrationsContent type:
  • text
Media type:
  • computer
Carrier type:
  • online resource
ISBN:
  • 9783527676361
  • 3527676368
  • 9783527676354
  • 352767635X
  • 9783527676347
  • 3527676341
  • 9783527676330
  • 3527676333
  • 3527335455
  • 9783527335459
Subject(s): Genre/Form: Additional physical formats: Print version:: Resonant MEMS : fundamentals, implementation and application.DDC classification:
  • 621.381 23
LOC classification:
  • TK7875
Online resources:
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Online resource; title from PDF title page (Ebsco, viewed May 11, 2015).

Includes bibliographical references and index.

Electrical & Electronic Engineering