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Atomic layer deposition : principles, characteristics, and nanotechnology applications / Tommi Kääriäinen, David Cameron, Marja-Leena Kääriäinen, and Arthur Sherman. by
Edition: 2nd edition.
Material type: Text Text; Format: available online remote; Literary form: Not fiction
Publisher: Salem, Massachusetts : Hoboken, New Jersey : Scrivener Publishing, LLC ; Wiley, [2013]
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2.
Atomic layer deposition of nanostructured materials / edited by Nicola Pinna, Mato Knez. by
Material type: Text Text; Format: available online remote; Literary form: Not fiction
Publication details: Weinheim : Chichester : Wiley-VCH ; John Wiley [distributor], 2011
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