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Atomic layer deposition : principles, characteristics, and nanotechnology applications / Tommi Kääriäinen, David Cameron, Marja-Leena Kääriäinen, and Arthur Sherman.

By: Contributor(s): Material type: TextTextPublisher: Salem, Massachusetts : Hoboken, New Jersey : Scrivener Publishing, LLC ; Wiley, [2013]Edition: 2nd editionDescription: 1 online resourceContent type:
  • text
Media type:
  • computer
Carrier type:
  • online resource
ISBN:
  • 9781118747384
  • 1118747380
  • 9781118747421
  • 1118747429
  • 9781118747346
  • 1118747348
  • 9781118747407
  • 1118747402
  • 9781299619128
  • 1299619126
Subject(s): Genre/Form: Additional physical formats: Print version:: Atomic layer deposition.DDC classification:
  • 620/.5 23
LOC classification:
  • TS695
Online resources:
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Includes bibliographical references and index.

Print version record and CIP data provided by publisher.