Atomic layer deposition : principles, characteristics, and nanotechnology applications / Tommi Kääriäinen, David Cameron, Marja-Leena Kääriäinen, and Arthur Sherman.
Material type: TextPublisher: Salem, Massachusetts : Hoboken, New Jersey : Scrivener Publishing, LLC ; Wiley, [2013]Edition: 2nd editionDescription: 1 online resourceContent type:- text
- computer
- online resource
- 9781118747384
- 1118747380
- 9781118747421
- 1118747429
- 9781118747346
- 1118747348
- 9781118747407
- 1118747402
- 9781299619128
- 1299619126
- 620/.5 23
- TS695
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Includes bibliographical references and index.
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